OLED Prototyping Line in NFF
Spin Coater & Hotplate
Spin coater
Contact Aligner
Deposition System
Control Panel
Contact Aligner
Deposition
Control Panel
Chambers
Glove Box
Microscope
Microscope
Ellipsometer
IVL
Alpha
PR650
Ellipsometer
I-V-L Testing
Glove Box
Pre-treat, organic, metal and transfer chambers
Vacuum Testing Chamber & PR650 Spectrometer
Surface Profile Alpha Step (Tencor P-10)
Characterization and Testing Equipment in NFF